6.251138 a bit map represent of the enti
3.3831947 the time of pixel comparison o
22.505861 the target pixel
25.733194 the stage posit
71.21721 the inspect system
4.6196947 substag illumin with non laser
89.82946 strip
21.02464 right vector represent
68.64512 pixel represent
74.96733 orient the target
94.796715 onli guardband inform
27.95014 more polygon
19.922312 laser beam in focu on the targ
87.67631 larger target area
29.731085 interferomet
51.649464 inspect a pattern on a target 
30.289629 inspect
83.493034 ic bar
79.73193 guardband around polygon side
65.09849 guardband
0.5277661 glass scale encod
8.8873625 fiduci mark
42.080635 each ic bar
20.229853 data descript
7.224106 an ideal pattern
20.88953 an autofocu keep
60.413902 align mark
13.561508 actual target area
46.654675 a turnpoint polygon represent
26.252214 a single data
35.34944 a laser pattern inspect and/or
97.3397 a databas
74.52305 a consolid
79.39144 writer
80.76869 system for pattern inspector
66.75354 defect area
76.63006 defect area consolid
10.923395 polygon data represent
18.105843 pattern compar with substag il
